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Method for modulating work function of semiconductor device having metal gate structure by gas treatment |
Yun-Tzu Chang, Shih-Min Chou, Kuo-Chih Lai, Hsiang-Chieh Yen, Yen-Chen Chen +3 more |
2017-08-08 |
| 9691704 |
Semiconductor structure and method for manufacturing the same |
Kuo-Chih Lai, Chia-Chang Hsu, Nien-Ting Ho, Yen-Chen Chen, Shih-Min Chou +4 more |
2017-06-27 |
| 9659937 |
Semiconductor process of forming metal gates with different threshold voltages and semiconductor structure thereof |
Chi-Mao Hsu, Wei-Ming Hsiao, Nien-Ting Ho, Kuo-Chih Lai |
2017-05-23 |
| 9576803 |
Method for tuning metal gate work function before contact formation in fin-shaped field effect transistor manufacturing process |
Kuo-Chih Lai, Yang Lu, Yen-Chen Chen, Shih-Min Chou, Yun-Tzu Chang +3 more |
2017-02-21 |