Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653404 | Overlay target for optically measuring overlay alignment of layers formed on semiconductor wafer | Yi-Jing Wang, En-Chiuan Liou, Han-Lin Zeng, Chia-Hung Lin, Chun-Chi Yu | 2017-05-16 |