Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9746786 | Overlay mask | Che-Yi Lin, En-Chiuan Liou, Chia-Hsun Tseng | 2017-08-29 |
| 9653404 | Overlay target for optically measuring overlay alignment of layers formed on semiconductor wafer | En-Chiuan Liou, Mei-Chen Chen, Han-Lin Zeng, Chia-Hung Lin, Chun-Chi Yu | 2017-05-16 |
| 9567987 | Chamber fluid removal system | — | 2017-02-14 |
| 9568842 | Overlay operation method and overlay control method | En-Chiuan Liou, Chia-Ching Lin | 2017-02-14 |
| 9546565 | Fluid intake and system for rotary machines | Nikolas WIEDEMANN | 2017-01-17 |