| 9793105 |
Fabricating method of fin field effect transistor (FinFET) |
Chun-Wei Yu, Hsu Ting, Chueh-Yang Liu, Yu-Ren Wang, Yi-Liang Ye |
2017-10-17 |
| 9748111 |
Method of fabricating semiconductor structure using planarization process and cleaning process |
Yi-Liang Ye, Chueh-Yang Liu, Yu-Ren Wang |
2017-08-29 |
| 9646889 |
Method of removing a hard mask layer on a gate structure while forming a protective layer on the surface of a substrate |
Chun-Wei Yu, Hsu Ting, Chueh-Yang Liu, Yu-Ren Wang |
2017-05-09 |
| 9627534 |
Semiconductor MOS device having a dense oxide film on a spacer |
Yi-Liang Ye, Chueh-Yang Liu, Yu-Ren Wang |
2017-04-18 |
| 9613808 |
Method of forming multilayer hard mask with treatment for removing impurities and forming dangling bonds |
Yi-Liang Ye, Chueh-Yang Liu, Yu-Ren Wang |
2017-04-04 |