Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793105 | Fabricating method of fin field effect transistor (FinFET) | Chun-Wei Yu, Hsu Ting, Chueh-Yang Liu, Yu-Ren Wang, Yi-Liang Ye | 2017-10-17 |
| 9748111 | Method of fabricating semiconductor structure using planarization process and cleaning process | Yi-Liang Ye, Chueh-Yang Liu, Yu-Ren Wang | 2017-08-29 |
| 9646889 | Method of removing a hard mask layer on a gate structure while forming a protective layer on the surface of a substrate | Chun-Wei Yu, Hsu Ting, Chueh-Yang Liu, Yu-Ren Wang | 2017-05-09 |
| 9627534 | Semiconductor MOS device having a dense oxide film on a spacer | Yi-Liang Ye, Chueh-Yang Liu, Yu-Ren Wang | 2017-04-18 |
| 9613808 | Method of forming multilayer hard mask with treatment for removing impurities and forming dangling bonds | Yi-Liang Ye, Chueh-Yang Liu, Yu-Ren Wang | 2017-04-04 |