Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793357 | Semiconductor device and method of manufacturing the same | Hiroshi Kono, Kohei Morizuka, Atsuko Yamashita, Tomohiro Nitta | 2017-10-17 |
| 9748342 | Semiconductor device and method for manufacturing the same | Tsuyoshi Oota, Atsuko Yamashita | 2017-08-29 |
| 9740105 | Resist pattern formation method and resist composition | Shinichi Hidesaka, Takeaki Shiroki | 2017-08-22 |
| 9618845 | Method for forming resist pattern, resist pattern splitting agent, split pattern improving agent, resist pattern splitting material, and positive resist composition for forming split pattern | Takayoshi Mori, Ryoji Watanabe, Rikita Tsunoda | 2017-04-11 |
| 9608058 | Semiconductor device | Ryoichi Ohara, Takao Noda | 2017-03-28 |
| 9581909 | Method of trimming resist pattern | Rikita Tsunoda, Ryoji Watanabe | 2017-02-28 |
| 9577046 | Semiconductor device | Tsuyoshi Oota, Hiroshi Kono, Atsuko Yamashita | 2017-02-21 |