Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9618845 | Method for forming resist pattern, resist pattern splitting agent, split pattern improving agent, resist pattern splitting material, and positive resist composition for forming split pattern | Yoichi Hori, Takayoshi Mori, Rikita Tsunoda | 2017-04-11 |
| 9581909 | Method of trimming resist pattern | Rikita Tsunoda, Yoichi Hori | 2017-02-28 |