Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696625 | Method of forming resist pattern | Tomoyuki Hirano, Junichi Tsuchiya, Tomonari SUNAMICHI, Takayoshi Mori | 2017-07-04 |
| 9618845 | Method for forming resist pattern, resist pattern splitting agent, split pattern improving agent, resist pattern splitting material, and positive resist composition for forming split pattern | Yoichi Hori, Takayoshi Mori, Ryoji Watanabe | 2017-04-11 |
| 9581909 | Method of trimming resist pattern | Ryoji Watanabe, Yoichi Hori | 2017-02-28 |