Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9776202 | Driving method of vertical heat treatment apparatus, storage medium and vertical heat treatment apparatus | Keisuke Suzuki, Kohei Fukushima, Shingo Hishiya | 2017-10-03 |
| D786810 | Dummy wafer | Kohei Fukushima | 2017-05-16 |
| D785576 | Dummy wafer | Kohei Fukushima | 2017-05-02 |
| D784937 | Dummy wafer | Kohei Fukushima | 2017-04-25 |