Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9789579 | Apparatus for detecting rammer tip-over | Takamasa Takeshige, Yasunori Matsubara | 2017-10-17 |
| 9776202 | Driving method of vertical heat treatment apparatus, storage medium and vertical heat treatment apparatus | Yutaka Motoyama, Keisuke Suzuki, Shingo Hishiya | 2017-10-03 |
| D786810 | Dummy wafer | Yutaka Motoyama | 2017-05-16 |
| D785576 | Dummy wafer | Yutaka Motoyama | 2017-05-02 |
| D784937 | Dummy wafer | Yutaka Motoyama | 2017-04-25 |
| 9624579 | Film forming apparatus, film forming method, and non-transitory computer-readable storage medium | — | 2017-04-18 |