Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9776202 | Driving method of vertical heat treatment apparatus, storage medium and vertical heat treatment apparatus | Yutaka Motoyama, Keisuke Suzuki, Kohei Fukushima | 2017-10-03 |
| 9562285 | Film forming method, film forming apparatus and storage medium | Keisuke Suzuki, Hiroki Murakami, Kentaro Kadonaga, Minoru Obata | 2017-02-07 |