Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D803802 | Electrostatic chuck for semiconductor manufacturing equipment | Tomoyuki Takahashi | 2017-11-28 |
| D802472 | Electrostatic chuck for semiconductor manufacturing equipment | Tomoyuki Takahashi | 2017-11-14 |
| 9791191 | Temperature control apparatus, processing apparatus, and temperature control method | Kazuyoshi Matsuzaki | 2017-10-17 |
| D795208 | Electrostatic chuck for semiconductor manufacturing equipment | Tomoyuki Takahashi | 2017-08-22 |
| 9721822 | Electrostatic chuck apparatus | Kenji Masuzawa, Toshiyuki MAKABE, Mamoru Kosakai, Takashi Satou, Kazunori Ishimura +2 more | 2017-08-01 |
| 9589823 | Mounting table and plasma processing apparatus | Takeshi Sugamata, Tadashi Aoto | 2017-03-07 |