Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9589823 | Mounting table and plasma processing apparatus | Yasuharu Sasaki, Takeshi Sugamata | 2017-03-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9589823 | Mounting table and plasma processing apparatus | Yasuharu Sasaki, Takeshi Sugamata | 2017-03-07 |