Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721822 | Electrostatic chuck apparatus | Yasuharu Sasaki, Kenji Masuzawa, Toshiyuki MAKABE, Mamoru Kosakai, Kazunori Ishimura +2 more | 2017-08-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721822 | Electrostatic chuck apparatus | Yasuharu Sasaki, Kenji Masuzawa, Toshiyuki MAKABE, Mamoru Kosakai, Kazunori Ishimura +2 more | 2017-08-01 |