Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779962 | Plasma etching method | Shinichi Kozuka, Yuta Seya, Aritoshi Mitani | 2017-10-03 |
| 9653317 | Plasma processing method and plasma processing apparatus | Masaru Nishino, Shinichi Kozuka, Ryosuke Niitsuma, Tsutomu Ito | 2017-05-16 |