Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D793572 | Electrode plate for plasma processing apparatus | Shinichi Kozuka, Manabu Ishikawa | 2017-08-01 |
| 9653317 | Plasma processing method and plasma processing apparatus | Masaru Nishino, Takao FUNAKUBO, Shinichi Kozuka, Tsutomu Ito | 2017-05-16 |