Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779962 | Plasma etching method | Takao FUNAKUBO, Yuta Seya, Aritoshi Mitani | 2017-10-03 |
| D793572 | Electrode plate for plasma processing apparatus | Ryosuke Niitsuma, Manabu Ishikawa | 2017-08-01 |
| 9653317 | Plasma processing method and plasma processing apparatus | Masaru Nishino, Takao FUNAKUBO, Ryosuke Niitsuma, Tsutomu Ito | 2017-05-16 |