Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754766 | Plasma processing apparatus | — | 2017-09-05 |
| 9646867 | Plasma processing apparatus, power supply unit and mounting table system | Masahiko Konno, Masayuki SHINTAKU, Takashi Suzuki, Michitaka Aita, Taizo Okada +2 more | 2017-05-09 |