Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761418 | Plasma processing apparatus | Takashi Suzuki, Masahiko Konno, Michitaka Aita, Taizo Okada, Hideo Kato +1 more | 2017-09-12 |
| 9646867 | Plasma processing apparatus, power supply unit and mounting table system | Masahiko Konno, Takashi Suzuki, Michitaka Aita, Taizo Okada, Naohiko Okunishi +2 more | 2017-05-09 |