Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761418 | Plasma processing apparatus | Masayuki SHINTAKU, Takashi Suzuki, Masahiko Konno, Taizo Okada, Hideo Kato +1 more | 2017-09-12 |
| 9646867 | Plasma processing apparatus, power supply unit and mounting table system | Masahiko Konno, Masayuki SHINTAKU, Takashi Suzuki, Taizo Okada, Naohiko Okunishi +2 more | 2017-05-09 |
| 9574270 | Plasma processing apparatus | Jun Yoshikawa | 2017-02-21 |