Issued Patents 2017
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824859 | Precision material modification using miniature-column charged particle beam arrays | Kevin M. Monahan, David K. Lam, Theodore A. Prescop | 2017-11-21 |
| 9822443 | Precision material modification using miniature-column charged particle beam arrays | Kevin M. Monahan, David K. Lam, Theodore A. Prescop | 2017-11-21 |
| 9818747 | Super-self-aligned contacts and method for making the same | — | 2017-11-14 |
| 9741719 | Methods, structures, and designs for self-aligning local interconnects used in integrated circuits | Scott T. Becker | 2017-08-22 |
| 9704845 | Methods for linewidth modification and apparatus implementing the same | Scott T. Becker | 2017-07-11 |
| 9673114 | Precision substrate material removal using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Theodore A. Prescop | 2017-06-06 |
| 9633987 | Integrated circuit cell library for multiple patterning | Scott T. Becker | 2017-04-25 |
| 9595515 | Semiconductor chip including integrated circuit defined within dynamic array section | Scott T. Becker | 2017-03-14 |
| 9595419 | Alignment and registration targets for multiple-column charged particle beam lithography and inspection | Kevin M. Monahan, Theodore A. Prescop, David K. Lam | 2017-03-14 |
| 9589091 | Scalable meta-data objects | Daryl Fox, Jonathan R. Quandt, Scott T. Becker | 2017-03-07 |
| 9556521 | Precision deposition using miniature-column charged particle beam arrays | Theodore A. Prescop, Kevin M. Monahan, David K. Lam | 2017-01-31 |