Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9822443 | Precision material modification using miniature-column charged particle beam arrays | Michael C. Smayling, Kevin M. Monahan, David K. Lam | 2017-11-21 |
| 9824859 | Precision material modification using miniature-column charged particle beam arrays | Michael C. Smayling, Kevin M. Monahan, David K. Lam | 2017-11-21 |
| 9673114 | Precision substrate material removal using miniature-column charged particle beam arrays | David K. Lam, Kevin M. Monahan, Michael C. Smayling | 2017-06-06 |
| 9620332 | Charged particle beam substrate inspection using both vector and raster scanning | David K. Lam, Kevin M. Monahan, Enden David Liu, Cong Tran | 2017-04-11 |
| 9595419 | Alignment and registration targets for multiple-column charged particle beam lithography and inspection | Kevin M. Monahan, Michael C. Smayling, David K. Lam | 2017-03-14 |
| 9556521 | Precision deposition using miniature-column charged particle beam arrays | Kevin M. Monahan, David K. Lam, Michael C. Smayling | 2017-01-31 |