Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543177 | Pod and purge system using the same | Tadamasa Iwamoto, Jun Emoto | 2017-01-10 |
| 9536765 | Load port unit and EFEM system | Tadamasa Iwamoto, Jun Emoto, Hidenori TSUTSUI | 2017-01-03 |