Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607871 | EFEM system and lid opening/closing method | — | 2017-03-28 |
| 9543177 | Pod and purge system using the same | Toshihiko Miyajima, Jun Emoto | 2017-01-10 |
| 9536765 | Load port unit and EFEM system | Jun Emoto, Toshihiko Miyajima, Hidenori TSUTSUI | 2017-01-03 |