Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9833817 | Gas purge unit, load port apparatus, and installation stand for purging container | Mutsuo Sasaki, Hiroshi Igarashi | 2017-12-05 |
| 9786531 | Gas purge unit, load port apparatus, and installation stand for purging container | Mutsuo Sasaki, Hiroshi Igarashi | 2017-10-10 |
| 9543177 | Pod and purge system using the same | Toshihiko Miyajima, Tadamasa Iwamoto | 2017-01-10 |
| 9536765 | Load port unit and EFEM system | Tadamasa Iwamoto, Toshihiko Miyajima, Hidenori TSUTSUI | 2017-01-03 |