Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804510 | Interferometer system, lithography apparatus, and article manufacturing method | Zenichi Hamaya, Ryo Takai, Shinichiro Hirai, Takeshi Rokukawa | 2017-10-31 |
| 9569382 | Inhibition device, method for controlling inhibition device, device under control, electronic equipment, and computer readable storage medium | Kenichi Horiuchi, Seigo Itoh | 2017-02-14 |