Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804510 | Interferometer system, lithography apparatus, and article manufacturing method | Zenichi Hamaya, Ryo Takai, Takeshi Rokukawa, Takashi Miura | 2017-10-31 |
SH
Shinichiro Hirai
Overall (2017): #245,607 of 506,227Top 50%
1
Patents 2017