Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804510 | Interferometer system, lithography apparatus, and article manufacturing method | Zenichi Hamaya, Shinichiro Hirai, Takeshi Rokukawa, Takashi Miura | 2017-10-31 |
RT
Ryo Takai
Overall (2017): #256,841 of 506,227Top 55%
1
Patents 2017