Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9789448 | Process for treating fluid | Shing-Fong Wu, SHIH-PAO CHIEN, Yen-Chen Chen | 2017-10-17 |
| 9744642 | Slurry feed system and method of providing slurry to chemical mechanical planarization station | Tsung-Huang Chen, Wei Li, Chi-Tung Lai | 2017-08-29 |
| 9643217 | In situ clean apparatus and method thereof | Li-Hsing Chien, Rouh Jier Wang, Yu-Te Chang | 2017-05-09 |