Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9657757 | System of exhuast and operation method thereof | Tung-Lin Yang, Chun-Hung Chang | 2017-05-23 |
| 9643217 | In situ clean apparatus and method thereof | Li-Hsing Chien, Yung-Ti Hung, Yu-Te Chang | 2017-05-09 |