Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9643217 | In situ clean apparatus and method thereof | Yung-Ti Hung, Rouh Jier Wang, Yu-Te Chang | 2017-05-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9643217 | In situ clean apparatus and method thereof | Yung-Ti Hung, Rouh Jier Wang, Yu-Te Chang | 2017-05-09 |