Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835940 | Method to fabricate mask-pellicle system | Chun-Hao Tseng, Sheng-Chi Chin | 2017-12-05 |
| 9810978 | Method for lithography patterning | Hsun-Chuan Shih | 2017-11-07 |
| 9759998 | Efficient solution for removing EUV native defects | Yen-Kai Huang, Hsun-Chuan Shih | 2017-09-12 |
| 9664995 | Method of manufacturing an extreme ultraviolet (EUV) mask and the mask manufactured therefrom | — | 2017-05-30 |
| 9659768 | Focused radiation beam induced thin film deposition | Chia-Hao Yu | 2017-05-23 |
| 9625808 | Durable metal film deposition for mask repair | Yen-Kai Huang | 2017-04-18 |