Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9759998 | Efficient solution for removing EUV native defects | Hsun-Chuan Shih, Yuan-Chih Chu | 2017-09-12 |
| 9625808 | Durable metal film deposition for mask repair | Yuan-Chih Chu | 2017-04-18 |