Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810978 | Method for lithography patterning | Yuan-Chih Chu | 2017-11-07 |
| 9759998 | Efficient solution for removing EUV native defects | Yen-Kai Huang, Yuan-Chih Chu | 2017-09-12 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810978 | Method for lithography patterning | Yuan-Chih Chu | 2017-11-07 |
| 9759998 | Efficient solution for removing EUV native defects | Yen-Kai Huang, Yuan-Chih Chu | 2017-09-12 |