Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9588505 | Near non-adaptive virtual metrology and chamber control | Tzu-Yu Wang, Chen-Hua Yu, Chien Rhone Wang, Henry Lo, Jung Cheng Ko +1 more | 2017-03-07 |
CL
Chih-Wei Lai
Overall (2017): #463,321 of 506,227Top 95%
1
Patents 2017