Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9738787 | Composition for forming silica-based insulating layer, method for preparing composition for forming silica-based insulating layer, silica-based insulating layer, and method for manufacturing silica-based insulating layer | Hui-Chan Yun, Taek-Soo Kwak, Mi Young Kim, Sang-Hak Lim, Kwen-Woo Han +8 more | 2017-08-22 |
| 9665003 | Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns | Yoo-Jeong Choi, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Hea-Jung Kim +8 more | 2017-05-30 |
| 9574108 | Composition for forming silica based insulating layer, silica based insulating layer and method for manufacturing silica based insulating layer | Eun Su Park, Taek-Soo Kwak, Yoong-Hee Na, Hyun-Ji SONG, Han-Song Lee | 2017-02-21 |