Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758870 | Substrate treatment apparatus, and method for controlling temperature of heater | Sung Tae Je, Il-Kwang Yang, Jae Ho Lee, Kyong-Hun Kim, Yang-Sik Shin | 2017-09-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758870 | Substrate treatment apparatus, and method for controlling temperature of heater | Sung Tae Je, Il-Kwang Yang, Jae Ho Lee, Kyong-Hun Kim, Yang-Sik Shin | 2017-09-12 |