Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758870 | Substrate treatment apparatus, and method for controlling temperature of heater | Il-Kwang Yang, Jae Ho Lee, Kyong-Hun Kim, Myung-In Kim, Yang-Sik Shin | 2017-09-12 |
| 9620395 | Apparatus for processing substrate for supplying reaction gas having phase difference | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2017-04-11 |
| 9593415 | Substrate processing apparatus including auxiliary gas supply port | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2017-03-14 |