Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758870 | Substrate treatment apparatus, and method for controlling temperature of heater | Sung Tae Je, Il-Kwang Yang, Jae Ho Lee, Myung-In Kim, Yang-Sik Shin | 2017-09-12 |
| 9644895 | Heater moving type substrate processing apparatus | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2017-05-09 |
| 9620395 | Apparatus for processing substrate for supplying reaction gas having phase difference | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2017-04-11 |
| 9593415 | Substrate processing apparatus including auxiliary gas supply port | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2017-03-14 |
| 9593418 | Showerhead having cooling system and substrate processing apparatus including the showerhead | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2017-03-14 |