Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804502 | Illumination device and method for using the same in the projection lithography machine | Aijun Zeng, Yunbo Zhang, Mingxing Chen, Ying-Tzung Wang | 2017-10-31 |
| 9709896 | Illumination system for lithographic projection exposure step-and-scan apparatus | Aijun Zeng, Liqun Chen, Ruifang FANG | 2017-07-18 |