Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709896 | Illumination system for lithographic projection exposure step-and-scan apparatus | Aijun Zeng, Liqun Chen, Huijie Huang | 2017-07-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709896 | Illumination system for lithographic projection exposure step-and-scan apparatus | Aijun Zeng, Liqun Chen, Huijie Huang | 2017-07-18 |