Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804502 | Illumination device and method for using the same in the projection lithography machine | Aijun Zeng, Mingxing Chen, Ying-Tzung Wang, Huijie Huang | 2017-10-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804502 | Illumination device and method for using the same in the projection lithography machine | Aijun Zeng, Mingxing Chen, Ying-Tzung Wang, Huijie Huang | 2017-10-31 |