Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852914 | Sacrificial-film removal method and substrate processing device | Tomonori Umezaki, Akiou Kikuchi | 2017-12-26 |
| 9786522 | Substrate treatment method and substrate treatment apparatus | Kenji Kobayashi | 2017-10-10 |
| 9768011 | Substrate treatment method and substrate treatment apparatus | — | 2017-09-19 |
| 9728443 | Substrate processing apparatus and substrate processing method | Naohiko YOSHIHARA, Kenji Kobayashi | 2017-08-08 |
| 9698031 | Substrate treatment method and substrate treatment apparatus | Kenji Kobayashi | 2017-07-04 |