Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852914 | Sacrificial-film removal method and substrate processing device | Manabu OKUTANI, Akiou Kikuchi | 2017-12-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852914 | Sacrificial-film removal method and substrate processing device | Manabu OKUTANI, Akiou Kikuchi | 2017-12-26 |