Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852914 | Sacrificial-film removal method and substrate processing device | Manabu OKUTANI, Tomonori Umezaki | 2017-12-26 |
| 9728422 | Dry etching method | Hiroyuki Oomori | 2017-08-08 |
| 9708720 | Gas generation device | Akifumi Yao | 2017-07-18 |
| 9676626 | IF7-derived iodine fluoride compound recovery method and recovery device | Masanori Watari | 2017-06-13 |