Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9645484 | Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the same | Hwan-Seok Seo, In-Sung Kim, Tae Geun Kim | 2017-05-09 |
| 9588413 | Photomask, method of correcting error thereof, integrated circuit device manufactured by using the photomask, and method of manufacturing the integrated circuit device | Sang Hyun Kim, Dong Gun Lee | 2017-03-07 |