Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791788 | Method of manufacturing a semiconductor device | Jin-Seok Heo | 2017-10-17 |
| 9658522 | Reflective extreme ultraviolet mask | Sang Hyun Kim, Dong-Wan Kim, Chang-Min Park, Dong Gun Lee | 2017-05-23 |
| 9645484 | Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the same | Seong-sue Kim, Hwan-Seok Seo, Tae Geun Kim | 2017-05-09 |