Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9645484 | Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the same | Seong-sue Kim, In-Sung Kim, Tae Geun Kim | 2017-05-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9645484 | Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the same | Seong-sue Kim, In-Sung Kim, Tae Geun Kim | 2017-05-09 |