Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804493 | Composition for forming topcoat layer and resist pattern formation method employing the same | Hyun-Woo Kim, Tetsuo Okayasu, Xiaowei Wang, Georg Pawlowski, Yusuke Hama | 2017-10-31 |
| 9772555 | Methods of forming patterns using photoresists | Sang-Yoon Woo, Cha-Won Koh, Hyun-Woo Kim, Sang Min Park | 2017-09-26 |
| 9564325 | Methods of fabricating a semiconductor device | Chawon Koh, Ki-Jeong Kim, Hyunwoo KIM, Hyosung Lee | 2017-02-07 |