Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810988 | Composition for forming overlay film, and resist pattern formation method employing the same | Xiaowei Wang, Masato Suzuki, Georg Pawlowski | 2017-11-07 |
| 9804493 | Composition for forming topcoat layer and resist pattern formation method employing the same | Hyun-Woo Kim, Cheol-Hong Park, Xiaowei Wang, Georg Pawlowski, Yusuke Hama | 2017-10-31 |