Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9764945 | Micromechanical component and corresponding test method for a micromechanical component | Sebastian Reiss, Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie +2 more | 2017-09-19 |
| 9725311 | Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting | Jochen Franz, Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie +3 more | 2017-08-08 |
| 9618740 | Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device | Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader +2 more | 2017-04-11 |